KORO

PRECISE, RELIABLE TRANSFER ROBOT SYSTEM WITH KOREA ROBOT

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Transfer from 5 inch to 12 inch Semiconductor wafer
Servo motors employed to boost high speed & accuracy performance
Precise transfer solution for Semiconductor Wafer
Controlled through RS-232C interface
Wafer mapping function, Travelling axis(Belt, Linear type) is available (Optional)
User friendly interface teaching Method(Easy-console)
Clean room application Installed in Semiconductor Fab (Korea, Taiwan, China)



1. Handling Object ©ª50mm to ©ª300mm - WAFER  
2. Range of Motion    
2.1 Z Axis stroke 300MM  
2.2 T Axis range Min 340¨¬  
2.3 Maximum reach distance 463.5mm(8inch below)
555mm(12inch)
 
2.4 Minimum working envelope with wafer ¨ª250mm (12inch)
¨ª205mm(8inch below)
¨ª210(8inch below with mapping
 
2.5 Robot mounting flange (top or bottom) According to project required  
2.6 Robot weight Max 29.5kgf  
3.0 Wafer Check    
3.1 Vacuum holding check Wafer chunk  
3.2 Vacuum holding check Vacuum sensor display  
4.End-effector    
4.1 Vacuum - suction points One suction point  
4.2 Type Fork / Tongue available  
4.3 Contact type Non edge contact  
4.4 Flatness 0.05mm  
4.5 Material Ceramic  
4.6 Payload < 500g(Included End-Effector)  
5.0 Repeatability    
5.1 Z Axis ¡¾0.05mm  
5.2 T Axis ¡¾0.05mm  
5.3 R Axis ¡¾0.05mm  
6.0 Vacuum setting value    
6.1 Setting point with vacuum sensor 50Kpa  
7.0 Teaching    
7.1 Teaching Pendant Handheld size, user friendly.
Equip with emergency STOP button.
By communication method
7.2 Teaching position 16 Stage position teaching data set.  
8.0Power & Utility    
8.1 Power AC 208V¡¾10% , 50/ 60Hz
Combination, Single Phase/ 12A
With travelling axis : 15A
8.2. Vacuum -80kpa or less
 
9.0 Interface    
9.1 Communication RS232C
 
10.0 Optional Travelling Axis, Mapping Sensor  



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