| 1. Handling Object |
ø50mm to ø200mm - LED WAFER |
|
| 2. Range of Motion |
|
|
| 2.1 Z Axis stroke |
300MM |
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| 2.2 T Axis range |
Min 340º |
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| 2.3 Maximum reach distance |
487.5~513mm |
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| 2.4 Minimum working envelope with wafer |
ø270mm(With Mapping) |
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| 2.5 Robot mounting flange (top or bottom) |
According to project required |
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| 2.6 Robot weight |
Max 65kgf |
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| 3.0 Wafer Check |
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| 3.1 Vacuum holding check |
Wafer chunk |
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| 3.2 Vacuum holding check |
Vacuum sensor display |
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| 4.0 End-effector |
|
|
| 4.1 Vacuum - suction points |
One suction point |
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| 4.2 Type |
Fork / Tongue available |
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| 4.3 Contact type |
Non edge contact |
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| 4.4 Flatness |
0.05mm |
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| 4.5 Material |
Ceramic |
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| 4.6 Payload |
< 300g(Included End-Effector) - A arm & B arm |
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| 5.0 Repeatability |
|
|
| 5.1 Z Axis |
±0.05mm |
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| 5.2 T Axis |
±0.05mm |
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| 5.3 R Axis |
±0.05mm |
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| 6.0 Vacuum setting value |
|
|
| 6.1 Setting point with vacuum sensor |
50Kpa |
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| 7.0 Teaching |
|
|
| 7.1 Teaching Pendant |
Handheld size, user friendly.
Equip with emergency STOP button. |
By communication |
| 7.2 Teaching position |
16 Stage position teaching data set. |
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| 8.0 Power & Utility |
|
|
| 8.1 Power |
AC 208V±10% , 50/ 60Hz
Combination, Single Phase/ 15A |
With travelling axis : 20A
|
| 8.2 Vacuum |
-80kpa or less
|
|
| 9.0 Interface |
|
|
| 9.1 Communication |
RS232C
|
|
| 10.0 Optional |
Travelling Axis, Mapping Sensor |
|
Transfer from 2 inch to 8 inch LED wafer
