KORO

PRECISE, RELIABLE TRANSFER ROBOT SYSTEM WITH KOREA ROBOT

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Transfer from 152mm * 152mm Solar wafer
Servo motors employed to boost high speed & accuracy performance
Precise transfer solution for LED Wafer
Controlled through RS-232C interface
Wafer mapping function, Travelling axis(Belt, Linear type) is available (Optional)
User friendly interface teaching method(Easy-console)
Clean room application
Installed in Solar Fab (Korea)



1. Handling Object 152mm * 152mm - SOLAR WAFER  
2. Range of Motion    
2.1 Z Axis stroke 520MM  
2.2 T Axis range Min 340¨¬  
2.3 Maximum reach distance 487.5~513mm  
2.4 Minimum working envelope with wafer ¨ª570mm(12inch)
¨ª600mm(12inch with mapping)
 
2.5 Robot mounting flange (top or bottom) According to project required  
2.6 Robot weight Max 65kgf  
3.0 Wafer Check    
3.1 Vacuum holding check Wafer chunk  
3.2 Vacuum holding check Vacuum sensor display  
4.0 End-effector    
4.1 Vacuum - suction points One suction point  
4.2 Type Fork / Tongue available  
4.3 Contact type Non edge contact  
4.4 Flatness 0.05mm  
4.5 Material Ceramic  
4.6 Payload > 300g(Included End-Effector) - A arm & B arm  
5.0 Repeatability    
5.1 Z Axis ¡¾0.05mm  
5.2 T Axis ¡¾0.05mm  
5.3 R Axis ¡¾0.05mm  
6.0 Vacuum setting value    
6.1 Setting Rang vacuum sensor 50Kpa  
7.0 Teaching    
7.1 Teaching Pendant Handheld size, user friendly.
Equip with emergency STOP button.
By communication
7.2 Teaching position 16 Stage position teaching data set.  
8.0Power & Utility    
8.1 Power AC 208V¡¾10% , 50/ 60Hz
Combination, Single Phase/ 15A
With travelling axis : 15A
8.2. Vacuum -80kpa or less
 
9.0 Interface    
9.1 Communication RS232C
 
10.0 Optional Travelling Axis  



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