KORO
Models |
Applications |
PHOTO |
Remarks |
Replacement In
Equipment |
Replaced
Robots Maker |
Model |
Process |
User Base |
KR-A6101
(6100 Modified
version) |
4" ~ 6"
Wafer
Transfer |
 |
Single Arm-
Liner type
Robot |
Anelva 4032 |
MECS |
UTC-800,
UTC-100
controller series
Robot |
Asher |
Faichild,
Samsung.
Anelva Japan |
KR-A6102`
(6100 Modified
version) |
4" ~ 6"
Wafer
Transfer |
|
Single Arm-
Liner type Robot |
MRC Equipment
company
Tools with
1) Eclipse 360 star
Sputter Tool
2) Eclipse Mark II
sputter tool
3) Eclipse Leaders
sputter tool
|
Brooks Automation
|
Model 7100-75
and 7100-76
Vacuum Orbitran
Robot with
Up/Down
Elevator |
Sputter |
Samsung,
Faichild,
KEC |
| KR-A8100 |
6" ~ 8"
Wafer
Transfer |
 |
Single Arm
Robot |
Gasonic
L2200 |
ADE Robot |
|
Asher |
Samsung,
LG Siltron
KEC
FAIRCHILD |
| KR-A8110 |
6" ~ 8"
Wafer
Transfer |
 |
Single Arm
Robot |
ANELVA
I-1060 |
MECS |
UTX-1200P |
SPUTTER |
CANNON-
ANELVA JP |
| KR-A5100 |
6" ~ 8"
Wafer
Transfer |
 |
Single Arm
Robot |
Gasonic
L3500 |
Brooks
Automation |
Z BOT
Orbitran Robot |
Asher |
Samsung |
| |
|
|
|
Gasonic
L3510 |
Brooks
Automation
- Z BOTOrbitran
Robot |
|
Asher |
Freescale
in USA,
Faichild,
UMC in Taiwan,
Infineon |
| KR-CMP |
6" ~ 8"
Wafer
Transfer |
 |
Dual Blade
Robot |
AMAT CMP
MIRRA 3400 |
AMT |
Mirra Long
Single Robot |
CMP
(Polishing) |
Samsung
in USA,
Dongbu HITEK |
| KR-820S |
6" ~ 8"
Wafer
Transfer |
 |
Single Arm
Robot |
Nano 8000 |
Kensington
3 links Robot |
Model 4000 |
Thickness
Inspection |
Dongbu-Hitek |
| |
|
|
|
Nano 9100 |
Kensington
3 links Robot |
Model 4000 |
Thickness
Inspection |
Samsung |
| KR-V9000 |
8" ~ 12"
Wafer
Transfer |
No photo |
Servo Spindle
Vacuum Robot |
Novellus
PECVD |
Novellus |
Vector F47 |
PECVD |
Samsung |
| KR-A3100 |
152mmx152mm
Reticle
Transfer |
 |
Single Arm |
Cannon
FPA 2500 |
Cannon robot |
|
Photoresist
Stripper |
SAMSUNG |
