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KM-ALWT12000 EFEM
 Transfer from 200mm ~ 300mm Semiconductor wafer
Precise transfer solution for semiconductor Wafer
Controlled through RS-232C interface
Wafer mapping function, Travelling axis(Belt, Linear type) is available
(Optional)
User friendly interface teaching method(Easy-console)
BCR, RFID avaiable (Optional)
Ulpa Filter with controller
Clean room application
Installed in Semiconductor Fab (Korea, Singapore) |
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| 1. Handling Object |
ø200mm to ø300mm - Semiconductor Wafer |
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| 2. WTR |
Single or Dual robot
Backside suction or Grip type available |
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| 3.0 Foup Opener |
1Port ~ 4Ports available, Semi Standard |
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| 5.Utility |
AC 208V±10%, 50/ 60Hz
Combination, Single or 3 Phase/ 50A for 3port standard |
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| 6.0 Noise |
80DB |
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| 7.0 Cleanclass |
Class 1 |
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| 8.0 Particle |
Contamination Free |
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