| EQUIPMEMT & ROBOT |
Applications |
PROCEE |
Remarks |
Model |
| ROBOT REFURBISHMENT FOR SEMICONDUCTOR |
NIKON STEPPER NSR 100~140 SERIES
NSR203,204
TAZMO ROBOT
|
8-12" wafer transfer |
PHOTO |
Single Arm Robot |
WDR36K068DN,
KBB17420 |
NIKON STEPPER NSR 100~140 SERIES
NSR203,204
JEL ROBOT |
12" Wafer Transfer robot |
PHOTO |
Single arm robot |
RR700L150-Z30-010 |
| ROBOT REFURBISHMENT FOR LCD |
AKT 1600 PX PE CVD
VACUUM ROBOT |
370mm x 470mm substrate |
PE CVD |
Single arm robot |
VAC1600 |
AKT 1600 PX PE CVD
ATM RORZE ROBOT |
370mm x 470mm
substrate |
PE CVD |
|
|
AKT 3500/ 4300 PX PE CVD
VACUUM ROBOT |
620mm x 750mm
substrates |
PE CVD |
Single arm robot |
VAC3500 |
AKT3500/4300 PE CVD
ATM ROBOT |
620mm x 750mm
substrates |
PE CVD |
Single arm robot |
ATM3500/4300 |
| TEL SE1300 ROBOT |
<Standard>
1100mm×1300mm
|
PLASMA ETCH/ASH |
DUAL ARM ROBOT |
SE1300 |
| DNS 1100 YASKAWA ROBOT |
620mm x 750mm
substrates |
PHOTO |
Single arm robot |
RR700L150-Z30-010 |
