KORO

PRECISE, RELIABLE TRANSFER ROBOT SYSTEM WITH KOREA ROBOT

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EQUIPMEMT & ROBOT Applications PROCEE Remarks Model
ROBOT REFURBISHMENT FOR SEMICONDUCTOR
NIKON STEPPER NSR 100~140 SERIES
NSR203,204
TAZMO ROBOT
8-12" wafer transfer PHOTO Single Arm Robot WDR36K068DN,
KBB17420
NIKON STEPPER NSR 100~140 SERIES
NSR203,204
JEL ROBOT
12" Wafer Transfer robot PHOTO Single arm robot RR700L150-Z30-010
ROBOT REFURBISHMENT FOR LCD
AKT 1600 PX PE CVD
VACUUM ROBOT
370mm x 470mm substrate PE CVD Single arm robot VAC1600
AKT 1600 PX PE CVD
ATM RORZE ROBOT
370mm x 470mm
substrate
PE CVD ¡¡ ¡¡
AKT 3500/ 4300 PX PE CVD
VACUUM ROBOT
620mm x 750mm
substrates
PE CVD Single arm robot VAC3500
AKT3500/4300 PE CVD
ATM ROBOT
620mm x 750mm
substrates
PE CVD Single arm robot ATM3500/4300
TEL SE1300 ROBOT <Standard>
1100mm¡¿1300mm
PLASMA ETCH/ASH DUAL ARM ROBOT SE1300
DNS 1100 YASKAWA ROBOT 620mm x 750mm
substrates
PHOTO Single arm robot RR700L150-Z30-010



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