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| HOME > PRODUCTS > SYSTEM > WAFER TRANSFER SYSTEM-BATCH |
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 Transfer from 125mm~150mm SEMICONDUCTOR wafer
Precise transfer solution for SEMICONDUCTOR Wafer
Wafer trnasfer Cassette to Quartz boat
Controlled through RS-232C interface
User friendly interface teaching Method(Easy-console)
High Performance per area usage
Clean room application
Installed in LED Fab (Korea, Taiwan, China) |
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| 1. Handling Object |
ø125mm to ø150mm - SEMICONDUCTOR Wafer |
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| 2. Wafer |
25ea or 50ea Wafer
Normal or BacktoBack |
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| 3.0 Utility |
AC 208V±10%, 50/ 60Hz
Combination, Single phase/ 40A for standard design |
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| 4.0 Noise |
80DB |
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| 5.0 Cassette & Boat Stage |
1~2 Stage Available |
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| 6.0 Cleanclass |
Class 1 |
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| 7.0 Particle |
Contamination Free |
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